Soft lithography refers to processes that use an elastomeric flat mold (similar to a rubber stamp) to create a pattern on a substrate surface:

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Soft lithography indeed involves using an elastomeric stamp or mold, often made from materials like PDMS (polydimethylsiloxane), to transfer patterns onto various substrates, which is a key technique in microfabrication and nanofabrication.

Soft Lithography Refers to Processes That Use an Elastomeric Flat