Chemical vapor deposition can be defined as the interaction between a mixture of gases and the surface of a heated substrate, causing chemical decomposition of some of the gas constituents and formation of a solid film on the substrate:

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Quizplus · Accepted Answer

Chemical vapor deposition (CVD) is a process where one or more volatile precursors are transported via vapor phase to a substrate where they decompose or react on the surface to produce a thin film or coating. This definition accurately describes the fundamental mechanism of CVD, involving the interaction between gas-phase chemicals and a heated substrate leading to the deposition of a solid material.

Chemical Vapor Deposition Can Be Defined as the Interaction Between