Epitaxial deposition refers to a process of growing a film onto a substrate so that the film has a crystalline structure that is an extension of the substrate's structure:

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Epitaxial deposition is a process where a crystalline film is grown on a substrate in such a way that the film's crystal structure is aligned with that of the substrate, effectively extending the substrate's crystalline structure.

Epitaxial Deposition Refers to a Process of Growing a Film