Vapor phase epitaxy is based on which one of the following:
A)chemical vapor deposition,
B)diffusion
C)ion implantation
D)physical vapor deposition
E)thermal oxidation

Question

Quizplus · Accepted Answer

Vapor phase epitaxy (VPE) is a process used to deposit layers of a material onto a substrate through the reaction of vapor phase chemicals that contain the desired element. This process is essentially a type of chemical vapor deposition (CVD), where the growth of the crystal layers is facilitated by chemical reactions at the surface of the substrate.

Vapor Phase Epitaxy Is Based on Which One of the Following